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DIN EN 62047-3:2007-02

Semiconductor devices - Micro-electromechanical devices - Part 3: Thin film standard test piece for tensile-testing.

STANDARD published on 1.2.2007

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The information about the standard:

Designation standards: DIN EN 62047-3:2007-02
Publication date standards: 1.2.2007
The number of pages: 9
Approximate weight : 27 g (0.06 lbs)
Country: German technical standard
Category: Technical standards DIN

Annotation of standard text DIN EN 62047-3:2007-02 :

Halbleiterbauelemente - Bauteile der Mikrosystemtechnik - Teil 3: Dünnschicht-Standardmikroprobe für die Prüfung der Zugbeanspruchung.