DIN EN 62047-1:2006-10

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions.

STANDARD published on 1.10.2006

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The information about the standard:

Designation standards: DIN EN 62047-1:2006-10
Note: WITHDRAWN
Publication date standards: 1.10.2006
The number of pages: 28
Approximate weight : 84 g (0.19 lbs)
Country: German technical standard
Category: Technical standards DIN

Annotation of standard text DIN EN 62047-1:2006-10 :

Halbleiterbauelemente - Bauteile der Mikrosystemtechnik - Teil 1: Begriffe und Definitionen.