DIN EN 62047-1:2016-12

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions.

STANDARD published on 1.12.2016

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The information about the standard:

Designation standards: DIN EN 62047-1:2016-12
Publication date standards: 1.12.2016
The number of pages: 37
Approximate weight : 111 g (0.24 lbs)
Country: German technical standard
Category: Technical standards DIN

Annotation of standard text DIN EN 62047-1:2016-12 :

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 1: Begriffe.