DIN EN 62047-10:2012-03

Semiconductor devices - Micro-electromechanical devices - Part 10: Micro-pillar compression test for MEMS materials.

STANDARD published on 1.3.2012

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The information about the standard:

Designation standards: DIN EN 62047-10:2012-03
Publication date standards: 1.3.2012
The number of pages: 13
Approximate weight : 39 g (0.09 lbs)
Country: German technical standard
Category: Technical standards DIN

Annotation of standard text DIN EN 62047-10:2012-03 :

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 10: Druckprüfverfahren an zylinderförmigen Mikroproben für Werkstoffe der Mikrosystemtechnik.