DIN EN 62047-11:2014-04

Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems.

STANDARD published on 1.4.2014

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The information about the standard:

Designation standards: DIN EN 62047-11:2014-04
Publication date standards: 1.4.2014
The number of pages: 21
Approximate weight : 63 g (0.14 lbs)
Country: German technical standard
Category: Technical standards DIN

Annotation of standard text DIN EN 62047-11:2014-04 :

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 11: Prüfverfahren für lineare thermische Ausdehnungskoeffizienten für freistehende Werkstoffe der Mikrosystemtechnik.