DIN EN 62047-17:2015-12

Semiconductor devices - Micro-electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin films.

STANDARD published on 1.12.2015

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The information about the standard:

Designation standards: DIN EN 62047-17:2015-12
Publication date standards: 1.12.2015
The number of pages: 28
Approximate weight : 84 g (0.19 lbs)
Country: German technical standard
Category: Technical standards DIN

Annotation of standard text DIN EN 62047-17:2015-12 :

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 17: Wölbungs-Prüfverfahren zur Bestimmung mechanischer Eigenschaften dünner Schichten.