DIN EN 62047-2:2007-02

Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials.

STANDARD published on 1.2.2007

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The information about the standard:

Designation standards: DIN EN 62047-2:2007-02
Publication date standards: 1.2.2007
The number of pages: 14
Approximate weight : 42 g (0.09 lbs)
Country: German technical standard
Category: Technical standards DIN

Annotation of standard text DIN EN 62047-2:2007-02 :

Halbleiterbauelemente - Bauteile der Mikrosystemtechnik - Teil 2: Prüfverfahren zur Zugbeanspruchung bei Dünnschicht-Werkstoffen.