DIN EN 62047-21:2015-04

Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson´s ratio of thin film MEMS materials.<

STANDARD published on 1.4.2015

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The information about the standard:

Designation standards: DIN EN 62047-21:2015-04
Publication date standards: 1.4.2015
The number of pages: 16
Approximate weight : 48 g (0.11 lbs)
Country: German technical standard
Category: Technical standards DIN

Annotation of standard text DIN EN 62047-21:2015-04 :

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 21: Prüfverfahren zur Querkontraktionszahl von Dünnschichtwerkstoffen der Mikrosystemtechnik.