DIN EN 62047-26:2016-12

Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures.

STANDARD published on 1.12.2016

German -
PDF - Immediate download (117.50 USD)

German -

Print design (142.40 USD)

German -

CD-ROM (119.10 USD)

The information about the standard:

Designation standards: DIN EN 62047-26:2016-12
Publication date standards: 1.12.2016
The number of pages: 29
Approximate weight : 87 g (0.19 lbs)
Country: German technical standard
Category: Technical standards DIN

Annotation of standard text DIN EN 62047-26:2016-12 :

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 26: Beschreibung und Messverfahren für Mikro-Rillen und Nadelstrukturen.