DIN EN 62047-4:2011-03

Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specification for MEMS.

STANDARD published on 1.3.2011

The information about the standard:

Designation standards: DIN EN 62047-4:2011-03
Publication date standards: 1.3.2011
The number of pages: 22
Approximate weight : 66 g (0.15 lbs)
Country: German technical standard
Category: Technical standards DIN