Semiconductor devices - Micro-electromechanical devices - Part 5: RF MEMS switches.
STANDARD published on 1.3.2012
Designation standards: DIN EN 62047-5:2012-03
Publication date standards: 1.3.2012
The number of pages: 37
Approximate weight : 111 g (0.24 lbs)
Country: German technical standard
Category: Technical standards DIN
Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 5: Hochfrequenz-MEMS-Schalter.