DIN EN 62047-6:2010-07

Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials.

STANDARD published on 1.7.2010

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The information about the standard:

Designation standards: DIN EN 62047-6:2010-07
Publication date standards: 1.7.2010
The number of pages: 17
Approximate weight : 51 g (0.11 lbs)
Country: German technical standard
Category: Technical standards DIN

Annotation of standard text DIN EN 62047-6:2010-07 :

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 6: Prüfverfahren zur uniaxialen Dauerschwingfestigkeit von Dünnschicht-Werkstoffen.