DIN EN 62047-8:2011-12

Semiconductor devices - Micro-electromechanical devices - Part 8: Strip bending test method for tensile property measurement of thin films.

STANDARD published on 1.12.2011

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The information about the standard:

Designation standards: DIN EN 62047-8:2011-12
Publication date standards: 1.12.2011
The number of pages: 20
Approximate weight : 60 g (0.13 lbs)
Country: German technical standard
Category: Technical standards DIN

Annotation of standard text DIN EN 62047-8:2011-12 :

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 8: Streifen-Biege-Prüfverfahren zur Messung von Zugbeanspruchungsmerkmalen dünner Schichten.