
Surface chemical analysis - Determination of lateral resolution and sharpness in beam based methods with a range from nanometers to micrometers ; Text in English.
STANDARD published on 1.11.2020
Designation standards: DIN ISO 18516:2020-11
Publication date standards: 1.11.2020
The number of pages: 63
Approximate weight : 189 g (0.42 lbs)
Country: German technical standard
Category: Technical standards DIN
Chemische Oberflächenanalyse - Augerelektronen-Spektroskopie und Röntgenphotoelektronen-Spektroskopie - Bestimmung der lateralen Auflösung ; Text Englisch.