E DIN EN 62047-17:2011-06

Semiconductor devices - Micro- electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin film.

STANDARD published on 1.6.2011

English and German -
electronic design (pdf) (125.10 USD)

English and German -

Print design (155.70 USD)

The information about the standard:

Designation standards: E DIN EN 62047-17:2011-06
Note: WITHDRAWN
Publication date standards: 1.6.2011
The number of pages: 45
Approximate weight : 135 g (0.30 lbs)
Country: German technical standard
Category: Technical standards DIN

Annotation of standard text E DIN EN 62047-17:2011-06 :

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 17: Wölbungs-Prüfverfahren zur Bestimmung mechanischer Eigenschaften dünner Schichten.