E DIN EN 62047-30:2016-08

Semiconductor devices - Micro-electromechanical devices - Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film.

STANDARD published on 1.8.2016

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The information about the standard:

Designation standards: E DIN EN 62047-30:2016-08
Note: WITHDRAWN
Publication date standards: 1.8.2016
The number of pages: 34
Approximate weight : 102 g (0.22 lbs)
Country: German technical standard
Category: Technical standards DIN

Annotation of standard text E DIN EN 62047-30:2016-08 :

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 30: Messverfahren für Kenngrößen der elektromechanischen Energiewandlung bei piezoelektrischen MEMS-Dünnschichten.