Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions.
STANDARD published on 1.5.2014
Designation standards: E DIN EN 62047-1:2014-05
Note: WITHDRAWN
Publication date standards: 1.5.2014
The number of pages: 59
Approximate weight : 177 g (0.39 lbs)
Country: German technical standard
Category: Technical standards DIN
Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 1: Begriffe.