Semiconductor devices - Micro-electromechanical devices - Part 15: Test method of bonding quality between PDMS and glass.
STANDARD published on 1.11.2012
Designation standards: E DIN EN 62047-15:2012-11
Note: WITHDRAWN
Publication date standards: 1.11.2012
The number of pages: 19
Approximate weight : 57 g (0.13 lbs)
Country: German technical standard
Category: Technical standards DIN
Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 15: Prüfverfahren zur Bondqualität zwischen PDMS und Glas.