E DIN EN 62047-21:2012-11

Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson´s ratio of thin film MEMS materials.<

STANDARD published on 1.11.2012

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The information about the standard:

Designation standards: E DIN EN 62047-21:2012-11
Note: WITHDRAWN
Publication date standards: 1.11.2012
The number of pages: 24
Approximate weight : 72 g (0.16 lbs)
Country: German technical standard
Category: Technical standards DIN

Annotation of standard text E DIN EN 62047-21:2012-11 :

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 21: Prüfverfahren zur Querkontraktionszahl von Dünnschichtwerkstoffen der Mikrosytsemtechnik.