E DIN EN 62047-25:2014-05

Semiconductor devices - Micro-electromechanical devices - Part 25: Silicon-based MEMS fabrication technology - Measurement method of pull-press and shearing strength of micro bonding area.

STANDARD published on 1.5.2014

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The information about the standard:

Designation standards: E DIN EN 62047-25:2014-05
Note: WITHDRAWN
Publication date standards: 1.5.2014
The number of pages: 38
Approximate weight : 114 g (0.25 lbs)
Country: German technical standard
Category: Technical standards DIN

Annotation of standard text E DIN EN 62047-25:2014-05 :

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 25: Siliziumbasierte MEMS-Herstellungstechnologie - Messverfahren zur Zug-Druck- und Scherfestigkeit gebondeter Flächen im Mikrometerbereich.