E DIN EN 62047-26:2014-05

Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures.

STANDARD published on 1.5.2014

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The information about the standard:

Designation standards: E DIN EN 62047-26:2014-05
Note: WITHDRAWN
Publication date standards: 1.5.2014
The number of pages: 53
Approximate weight : 159 g (0.35 lbs)
Country: German technical standard
Category: Technical standards DIN

Annotation of standard text E DIN EN 62047-26:2014-05 :

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 26: Beschreibung und Messverfahren für Mikro-Rillen und Nadelstrukturen.