Semiconductor devices - Part 1: Microelectromechanical devices; Terms and definitions.
STANDARD published on 1.10.2003
Designation standards: E DIN IEC 62047-1:2003-10
Note: WITHDRAWN
Publication date standards: 1.10.2003
The number of pages: 37
Approximate weight : 111 g (0.24 lbs)
Country: German technical standard
Category: Technical standards DIN
Halbleiterbauelemente - Teil 1: Bauteile der Mikrosystemtechnik; Begriffe und Definitionen.