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E DIN IEC 62047-10:2010-05

Semiconductor devices - Micro-electromechanical devices - Part 10: Micropillar compression test for MEMS materials.

STANDARD published on 1.5.2010

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The information about the standard:

Designation standards: E DIN IEC 62047-10:2010-05
Note: WITHDRAWN
Publication date standards: 1.5.2010
The number of pages: 18
Approximate weight : 54 g (0.12 lbs)
Country: German technical standard
Category: Technical standards DIN

Annotation of standard text E DIN IEC 62047-10:2010-05 :

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 10: Druckprüfverfahren an zylinderförmigen Mikroproben für Werkstoffe der Mikrosystemtechnik.