E DIN IEC 62047-11:2010-06

Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for linear thermal expansion coefficients of MEMS materials.

STANDARD published on 1.6.2010

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The information about the standard:

Designation standards: E DIN IEC 62047-11:2010-06
Note: WITHDRAWN
Publication date standards: 1.6.2010
The number of pages: 24
Approximate weight : 72 g (0.16 lbs)
Country: German technical standard
Category: Technical standards DIN

Annotation of standard text E DIN IEC 62047-11:2010-06 :

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 11: Prüfverfahren für lineare thermische Ausdehnungskoeffizienten für Werkstoffe der Mikrosystemtechnik.