E DIN IEC 62047-12:2010-05

Semiconductor devices - Micro-electromechanical devices - Part 12: A method for fatigue testing thin film materials using the resonant vibration of a MEMS structure.

STANDARD published on 1.5.2010

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The information about the standard:

Designation standards: E DIN IEC 62047-12:2010-05
Note: WITHDRAWN
Publication date standards: 1.5.2010
The number of pages: 46
Approximate weight : 138 g (0.30 lbs)
Country: German technical standard
Category: Technical standards DIN

Annotation of standard text E DIN IEC 62047-12:2010-05 :

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 12: Verfahren zur Prüfung der Ermüdungsfestigkeit von Dünnschichtwerkstoffen unter Verwendung der Resonanzschwingungen bei MEMS-Strukturen.