Microelectromechanical devices - Part 2: Tensile testing method of thin film materials.
STANDARD published on 1.8.2004
Designation standards: E DIN IEC 62047-2:2004-08
Note: WITHDRAWN
Publication date standards: 1.8.2004
The number of pages: 22
Approximate weight : 66 g (0.15 lbs)
Country: German technical standard
Category: Technical standards DIN
Bauteile der Mikrosystemtechnik - Teil 2: Prüfverfahren zur Zugbeanspruchung bei Dünnschicht-Werkstoffen.