E DIN IEC 62047-3:2004-08

Microelectromechanical devices - Part 3: Thin film standard test piece.

STANDARD published on 1.8.2004

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The information about the standard:

Designation standards: E DIN IEC 62047-3:2004-08
Note: WITHDRAWN
Publication date standards: 1.8.2004
The number of pages: 10
Approximate weight : 30 g (0.07 lbs)
Country: German technical standard
Category: Technical standards DIN

Annotation of standard text E DIN IEC 62047-3:2004-08 :

Bauteile der Mikrosystemtechnik - Teil 3: Dünnschicht-Standardmikroprobe.