E DIN IEC 62047-4:2006-09

Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specification for MEMS.

STANDARD published on 1.9.2006

English and German -
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The information about the standard:

Designation standards: E DIN IEC 62047-4:2006-09
Note: WITHDRAWN
Publication date standards: 1.9.2006
The number of pages: 53
Approximate weight : 159 g (0.35 lbs)
Country: German technical standard
Category: Technical standards DIN

Annotation of standard text E DIN IEC 62047-4:2006-09 :

Halbleiterbauelemente - Bauteile der Mikrosystemtechnik - Teil 4: Fachgrundspezifikation für Bauteile der Mikrosystemtechnik.