Semiconductor devices - Micro-electromechanical devices - Part 5: RF MEMS Switches.
STANDARD published on 1.2.2008
Designation standards: E DIN IEC 62047-5:2008-02
Note: WITHDRAWN
Publication date standards: 1.2.2008
The number of pages: 48
Approximate weight : 144 g (0.32 lbs)
Country: German technical standard
Category: Technical standards DIN
Halbleiterbauelemente - Bauteile der Mikrosystemtechnik - Teil 5: Mikro-elektromechanische Schalter für Hochfrequenzanwendungen (HF-MEMS-Schalter).