Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials.
STANDARD published on 1.7.2007
Designation standards: E DIN IEC 62047-6:2007-07
Note: WITHDRAWN
Publication date standards: 1.7.2007
The number of pages: 32
Approximate weight : 96 g (0.21 lbs)
Country: German technical standard
Category: Technical standards DIN
Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 6: Prüfverfahren zur uniaxialen Dauerschwingfestigkeit von Dünnschicht-Werkstoffen.