GB/T 14141-1993

Test method for sheet resistance of silicon epitaxial, diffused and ion-implanted layers using a collinear four-probe array

STANDARD published on 6.2.1993

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The information about the standard:

Designation standards: GB/T 14141-1993
Note: WITHDRAWN
Publication date standards: 6.2.1993
Country: Chinese technical standard
Category: Technical standards GB