GB/T 16596-1996

Specification for establishing a wafer coordinate system

STANDARD published on 4.11.1996

English, Chinese -
electronic design (pdf) (298.80 USD)

The information about the standard:

Designation standards: GB/T 16596-1996
Note: WITHDRAWN
Publication date standards: 4.11.1996
Country: Chinese technical standard
Category: Technical standards GB