GB/T 17169-1997

Test method for the surface quality of polished silicon wafers and epitaxial wafers by optical-reflection

STANDARD published on 22.12.1997

English, Chinese -
electronic design (pdf) (498.80 USD)

The information about the standard:

Designation standards: GB/T 17169-1997
Note: WITHDRAWN
Publication date standards: 22.12.1997
Country: Chinese technical standard
Category: Technical standards GB