GB/T 26070-2010

Characterization of subsurface damage in polished compound semiconductor wafers by reflectance difference spectroscopy method

STANDARD published on 10.1.2011

English, Chinese -
electronic design (pdf) (394.80 USD)

English, Chinese -

Print design (394.80 USD)

The information about the standard:

Designation standards: GB/T 26070-2010
Publication date standards: 10.1.2011
Country: Chinese technical standard
Category: Technical standards GB