GB/T 26113-2010

Micro-electromechanical system technology - General rules for the assessment of micro-geometrical parameters

STANDARD published on 10.1.2011

English, Chinese -
electronic design (pdf) (168.00 USD)

The information about the standard:

Designation standards: GB/T 26113-2010
Publication date standards: 10.1.2011
Country: Chinese technical standard
Category: Technical standards GB