
Trichlorosilane for silicon epitaxy - Determination of boronaluminiumphosphorusvanadiumchromemanganeseironcobaltnickelcoppermolybdenumarsenic and antimony content - Inductively coupled plasma mass spectrometric method
STANDARD published on 31.12.2012
Designation standards: GB/T 29056-2012
Note: WITHDRAWN
Publication date standards: 31.12.2012
Country: Chinese technical standard
Category: Technical standards GB