GB/T 29505-2013

Test method for measuring surface roughness on planar surfaces of silicon wafer

STANDARD published on 9.5.2013

English, Chinese -
electronic design (pdf) (802.80 USD)

The information about the standard:

Designation standards: GB/T 29505-2013
Publication date standards: 9.5.2013
Country: Chinese technical standard
Category: Technical standards GB