GB/T 29844-2013

Specifications of metrology patterns for the evaluation of advanced photolithgraphy

STANDARD published on 12.11.2013

English, Chinese -
electronic design (pdf) (310.80 USD)

The information about the standard:

Designation standards: GB/T 29844-2013
Publication date standards: 12.11.2013
Country: Chinese technical standard
Category: Technical standards GB