GB/T 34893-2017

Micro-electromechanical system technology—Measuring method for in-plane length measurements of MEMS microstructures using an optical interferometer

STANDARD published on 1.11.2017

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The information about the standard:

Designation standards: GB/T 34893-2017
Publication date standards: 1.11.2017
Country: Chinese technical standard
Category: Technical standards GB