GB/T 40110-2021

Surface chemical analysis—Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy

STANDARD published on 21.5.2021

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The information about the standard:

Designation standards: GB/T 40110-2021
Publication date standards: 21.5.2021
Country: Chinese technical standard
Category: Technical standards GB