
Semiconductor devices—Micro-electromechanical devices—Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures
STANDARD published on 30.7.2026
Designation standards: GB/T 42709.12-2026
Note: Execute Date: february 2027
Publication date standards: 30.7.2026
Country: Chinese technical standard
Category: Technical standards GB