GB/T 43493.3-2023

Semiconductor device—Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices—Part 3: Test method for defects using photoluminescence

STANDARD published on 28.12.2023

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The information about the standard:

Designation standards: GB/T 43493.3-2023
Publication date standards: 28.12.2023
Country: Chinese technical standard
Category: Technical standards GB