GB/T 43894.3-2026

Practice for determining semiconductor wafer near-edge geometry—Part 3:Sector area flatness(ESFQRESFQDESBIR

STANDARD published on 2.7.2026

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The information about the standard:

Designation standards: GB/T 43894.3-2026
Note: Execute Date: february 2027
Publication date standards: 2.7.2026
Country: Chinese technical standard
Category: Technical standards GB