GB/T 44517-2024

Micro-electromechanical systems (MEMS) technology—Wafer curvature and cantilever beam deflection test methods for determining residual stresses of MEMS films

STANDARD published on 29.9.2024

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The information about the standard:

Designation standards: GB/T 44517-2024
Publication date standards: 29.9.2024
Country: Chinese technical standard
Category: Technical standards GB