Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson´s ratio of thin film MEMS materials<
STANDARD published on 19.6.2014
Designation standards: IEC 62047-21-ed.1.0
Publication date standards: 19.6.2014
The number of pages: 26
Approximate weight : 78 g (0.17 lbs)
Country: International technical standard
Category: Technical standards IEC
IEC 62047-21:2014 specifies the determination of Poissons ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 µm. LIEC 62047-21:2014 specifie la determination du coefficient de Poisson a partir des resultats obtenus par lapplication dessais de charges uniaxiales et biaxiales aux materiaux pour systemes microelectromecaniques (MEMS, Micro-Electrical-Mechanical Systems) a couche mince dont les longueurs et les largeurs sont inferieures a 10 mm et les epaisseurs sont inferieures a 10 µm.