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IEC 62047-28-ed.1.0

Semiconductor devices - Micro-electromechanical devices - Part 28: Performance testing method of vibration-driven MEMS electret energy harvesting devices

STANDARD published on 20.1.2017

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The information about the standard:

Designation standards: IEC 62047-28-ed.1.0
Publication date standards: 20.1.2017
The number of pages: 17
Approximate weight : 51 g (0.11 lbs)
Country: International technical standard
Category: Technical standards IEC

Annotation of standard text IEC 62047-28-ed.1.0 :

IEC 62047-28:2017(E) specifies terms and definitions, and a performance testing method of vibration driven MEMS electret energy harvesting devices to determine the characteristic parameters for consumer, industry or any application. This document applies to vibration driven electret energy harvesting devices whose electrodes with a gap below 1 000 µm are covered by dielectric material with trapped charges and are fabricated by MEMS processes such as etching, photolithography or deposition.