IEC 62047-32-ed.1.0

Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators

STANDARD published on 24.1.2019

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The information about the standard:

Designation standards: IEC 62047-32-ed.1.0
Publication date standards: 24.1.2019
The number of pages: 37
Approximate weight : 111 g (0.24 lbs)
Country: International technical standard
Category: Technical standards IEC

Annotation of standard text IEC 62047-32-ed.1.0 :

IEC 62047-32:2019 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators. L’IEC 62047-32:2019 specifie la methode d’essai et les conditions d’essai pour la vibration non lineaire des resonateurs MEMS. Les enonces du present document s’appliquent au developpement et a la fabrication des resonateurs MEMS.