IEC 62047-34-ed.1.0

Semiconductor devices - Micro-electromechanical devices - Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer

STANDARD published on 5.4.2019

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The information about the standard:

Designation standards: IEC 62047-34-ed.1.0
Publication date standards: 5.4.2019
The number of pages: 16
Approximate weight : 48 g (0.11 lbs)
Country: International technical standard
Category: Technical standards IEC

Annotation of standard text IEC 62047-34-ed.1.0 :

IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.