IEC/TR 63258-ed.1.0

Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films

STANDARD published on 19.3.2021

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The information about the standard:

Designation standards: IEC/TR 63258-ed.1.0
Publication date standards: 19.3.2021
Approximate weight : 300 g (0.66 lbs)
Country: International technical standard
Category: Technical standards IEC

Annotation of standard text IEC/TR 63258-ed.1.0 :

IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.