
Cleanrooms and associated controlled environments — Part 14: Assessment of suitability for use of equipment by airborne particle concentration
STANDARD published on 14.9.2016
Designation standards: ISO 14644-14:2016
Publication date standards: 14.9.2016
The number of pages: 21
Approximate weight : 63 g (0.14 lbs)
Country: International technical standard
Category: Technical standards ISO